Fully Automatic Operation: The robotic arm automatically handles workpieces, and the in-tank process flows operate automatically without human intervention during processing.

Acid Tank Cleaning: Using chemical solutions with a circulation and filtration system to clean the surfaces of ceramic components.

Chemical Solution Recycling: After processing, the chemical solution is filtered and stored in a reservoir for reuse in subsequent cycles.

Water Tank Cleaning: Features rapid water filling (within 1 minute), slow overflow (2-10 L/min to remove contaminants), high-pressure spraying (adjustable pressure 0.3-1.2 MPa), bottom nitrogen bubbling (adjustable flow rate 10-100 L/min), and rapid drainage (emptying within 10 seconds) to meet various workpiece process requirements.

Water-Saving Function: DIW from slow overflow and spraying can be collected via a recycling pipeline into a pure water tank for reuse in subsequent fillings, significantly conserving DIW.

Drying Function: Utilizing high-temperature N₂ gas combined with in-tank infrared heating tubes for drying.

Flexible Process Design: Allows for multiple process recipes to be set up on the equipment, with easy and rapid modifications.

Multi-Level User Process Database: Available for user access and storage.