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Auxiliary Eqpt.

In-Line Heater

The in-line heater is a highly efficient heating device designed f-or the semiconductor industry and is suitable for medium heati-ng scenarios that require precise temperature control.The heate-r is made of high quality quartz material with excellent corrosion resistance and thermal stability to operate in harsh industrial en-vironments.Its power range can be customized from 3 to 12KW to meet different process requirements. Through the circulation-in-line design, the heater enables fast and uniform medium hea-ting, ensuring high efficiency and consistency in the process.


产品详情

ModelCGB-WH3CGB-WH6CGB-WH12
Power3KW6KW12KW
Heating Range25~85℃

Temperature

Control Accuracy

±1℃

    1.The change of the flow rate is ±10% (the temperature changes with the flow rate)

    2.The inlet water temperature of pure water changes in ±5%

    3.The power supply voltage fluctuation is 5% (rated voltage is 10%)

    4.The above thr ee situations cannot occur at the same time

Circulating Flow Range5~30L/min
Heater Time≤30min
Safety Features

    1.Overtemperature protection

    2.Dry burning protection

    3. Leakage overcurrent protection

    4. Low liquid level protection

    5. Leakage protection

Applicable

Chemical Class

    1. Applicable liquid types:Inorganic acids(HCl, H₂SO₄, HNO₃, H₃PO₄), organic solvents

       (C₂H₅OH, C₃H₆O, C₇H₈), strong oxidizers(H₂O₂, O₃, NaClO), ultrapure water(H₂O), and

       low-concentration weak alkalis (NaOH, KOH) ; Prohibited: Hydrofluoric acid (HF, SiO₂ +

       4HF→SiF₄↑+2H₂O), high-temperature molten alkalis (NaOH/KOH).

    2. Applicable gas types:Suitable for inert gases(N₂, Ar, He),oxidizing gases(O₂, dry air), 

       reducing gases (H₂, CO), common industrial gases (CO₂, CH₄, C₃H₈) , and dry & clean

       gases (e.g., high-purity N₂), with specific protections required.